铌靶

Ta             10 ppm

Mg           1 ppm

Co             1 ppm

Fe             3 ppm

Al            1 ppm

Cu             1 ppm

Si             10 ppm

K             1 ppm

Zn             1 ppm

Ni             1 ppm

Ca            1 ppm

As             1 ppm

Li             1 ppm

Ti            1 ppm

Zr             1 ppm

Be             1 ppm

V             1 ppm

Mo            1 ppm

B              1 ppm

Cr            1 ppm

Sn             1 ppm

Na             1 ppm

Mn           1 ppm

Sb             1 ppm

Ba             1 ppm

Pb            1ppm

F              40 ppm

W             1 ppm

Bi            1 ppm

L.O.I          < 0.1%