发布时间:2013-09-23 10:09:37
Product
Silicon/Aluminum target
Composition
90:10
Purity
99.9%
Qty
1 set
Dimension
Tolerance
±0.2mm
Resistivity
0.65 mΩ .cm
Relative Density
>99%
Impurity Content
Unit:%
Silicon Aluminum
Fe
P
Ca
0.038
0.0001
0.009
Cr
Cd
0.002
0.003